diff --git a/.reuse/dep5 b/.reuse/dep5
deleted file mode 100644
index 9cdb56e8..00000000
--- a/.reuse/dep5
+++ /dev/null
@@ -1,28 +0,0 @@
-Format: https://www.debian.org/doc/packaging-manuals/copyright-format/1.0/
-Upstream-Name: libcamera
-Upstream-Contact: Laurent Pinchart <laurent.pinchart@ideasonboard.com>
-Source: https://git.libcamera.org/libcamera/libcamera.git/
-
-Files: Documentation/binning.svg
-       Documentation/camera-sensor-model.rst
-       Documentation/sensor_model.svg
-       Documentation/theme/static/libcamera-logo-text.svg
-Copyright: Copyright 2023 Ideas On Board Oy
-License: CC-BY-SA-4.0
-
-Files: src/ipa/rpi/vc4/data/*.json
-       utils/raspberrypi/ctt/ctt_config_example.json
-       utils/raspberrypi/ctt/ctt_ref.pgm
-Copyright: 2019-2020 Raspberry Pi Ltd
-License: BSD-2-Clause
-
-Files: src/qcam/assets/feathericons/*.svg
-Copyright: 2019 Cole Bemis (and other Feather icons contributors)
-License: MIT
-Comment: https://feathericons.com/
-
-Files: utils/ipc/mojo
-       utils/ipc/tools
-Copyright: Copyright 2013-2020 The Chromium Authors. All rights reserved.
-License: BSD-3-Clause
-Source: https://chromium.googlesource.com/chromium/src.git/
diff --git a/REUSE.toml b/REUSE.toml
new file mode 100644
index 00000000..6a60b018
--- /dev/null
+++ b/REUSE.toml
@@ -0,0 +1,29 @@
+version = 1
+SPDX-PackageName = "libcamera"
+SPDX-PackageSupplier = "Laurent Pinchart <laurent.pinchart@ideasonboard.com>"
+SPDX-PackageDownloadLocation = "https://git.libcamera.org/libcamera/libcamera.git/"
+
+[[annotations]]
+path = ["Documentation/binning.svg", "Documentation/camera-sensor-model.rst", "Documentation/sensor_model.svg", "Documentation/theme/static/libcamera-logo-text.svg"]
+precedence = "aggregate"
+SPDX-FileCopyrightText = "Copyright 2023 Ideas On Board Oy"
+SPDX-License-Identifier = "CC-BY-SA-4.0"
+
+[[annotations]]
+path = ["src/ipa/rpi/vc4/data/*.json", "utils/raspberrypi/ctt/ctt_config_example.json", "utils/raspberrypi/ctt/ctt_ref.pgm"]
+precedence = "aggregate"
+SPDX-FileCopyrightText = "2019-2020 Raspberry Pi Ltd"
+SPDX-License-Identifier = "BSD-2-Clause"
+
+[[annotations]]
+path = "src/qcam/assets/feathericons/*.svg"
+precedence = "aggregate"
+SPDX-FileCopyrightText = "2019 Cole Bemis (and other Feather icons contributors)"
+SPDX-License-Identifier = "MIT"
+SPDX-FileComment = "https://feathericons.com/"
+
+[[annotations]]
+path = ["utils/ipc/mojo", "utils/ipc/tools"]
+precedence = "aggregate"
+SPDX-FileCopyrightText = "Copyright 2013-2020 The Chromium Authors. All rights reserved."
+SPDX-License-Identifier = "BSD-3-Clause"